Surface Analysis (SA)
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- Scanning Electron Microscope (SEM) / Energy Dispersive X-Ray Spectrometry (EDS)
○ Conventional SEM using a JEOL 6480-LV.
○ Secondary electron imaging (SEI).
○ Backscatter electron imaging (BEI) with low vacuum imaging capabilities.
○ EDAX X-Ray Fluorescence CDU Leap Detection.
- Fourier transform Infrared Microscopy (FT-IR Microscopy)
○ Using a Nexus 870 FT-IR spectrometer and Continuum IR microscope.
- Electron Spectroscopy for Chemical Analysis (ESCA) / Static Secondary Ion Mass Spectrometry Analysis (Static SIMS)
○ Standard survey analysis using a PHI
Perkin Elmer or Highenergy resolution sooectron 5600ci ESCA.
○ Depth profile.
○ Standard ISS Analysis.
- Auger Electron Spectrometry (AES)
○ Standard AES analysis using a PHI Perkin Elmer 660 scanning Auger microprobe.
○ Depth Profile with ZalarTM rotation.
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Scanning Probe Microscope (AFM)
○ Using a Digital Instrument Nanoscope IIIa.
- Ion Scattering Spectroscopy (ISS)
○ Standard SIMS Analysis.
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Last modified
2009-10-19 18:26
SERMACS 2009
